ZHISENSOR
MEMS Chip
MEMS Chip
MEMS mirror is an optical actuator, which is used to steer the laser beam.
Since this mirror can achieve high-speed and dynamic scanning of the laser beam, the mechanical scanner could be efficiently replaced.
MEMS mirror is made of monocrystalline silicon, which has the characteristics of high reliability, small volume, light weight and readily to be batch fabricated.
Zhisensor has 1D and 2D MEMS mirror products, and can provide customized products and services according to user needs.
Since this mirror can achieve high-speed and dynamic scanning of the laser beam, the mechanical scanner could be efficiently replaced.
MEMS mirror is made of monocrystalline silicon, which has the characteristics of high reliability, small volume, light weight and readily to be batch fabricated.
Zhisensor has 1D and 2D MEMS mirror products, and can provide customized products and services according to user needs.
| Model | C1130 | C1100 | C2110 | C2120 |
| Product Photo |  | 
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| Type of Motion | 1D Resonant | 1D Resonant | 2D Resonant | 2D Resonant
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| Frequency | 1.15kHz | 5.8kHz | Fast Axis:13kHz ; Slow Axis:1.2kHz | Fast Axis:13kHz ; Slow Axis:1.2kHz
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| Optical Scan Angle | ±30° | ±30° | Fast Axis:±15° ; Slow Axis:±12° | Fast Axis:±15° ; Slow Axis:±12°
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Mirror Coating
| Au | Au | Au | Au
|
| Datasheet | C1130 | C1100 | C2110 |
Model | C1130 | C1100 | C2110 | C2120 |
Product Photo |  |  |  | |
Type of Motion | 1D Resonant | 1D Resonant | 2D Resonant | 2D Resonant |
Frequency | 1.15kHz | 5.3kHz | Fast Axis:13kHz ; Slow Axis:1.2kHz | Fast Axis:25kHz ; Slow Axis:2.3kHz |
Optical Scan Angle | ±30° | ±30° | Fast Axis:±15° ; Slow Axis:±12° | Fast Axis:±15° ; Slow Axis:±12° |
Mirror Coating | Au | Au | Au | Au |
Datasheet | C1130 | C1100 | C2110 | C2120 |