MEMS Chip

Products

MEMS Module                                         

Argus100

Argus100L

Argus120


       MEMS mirror is an optical actuator, which is used to steer the laser beam.
      Since this mirror can achieve high-speed and dynamic scanning of the laser beam, the mechanical scanner could be efficiently replaced.
       MEMS mirror is made of monocrystalline silicon, which has the characteristics of high reliability, small volume, light weight and readily to be batch fabricated. 
       Zhisensor has 1D and 2D MEMS mirror products, and can provide customized products and services according to user needs.

Model 
C1130
C1100
C2110
C2120
Product Photo
Type of Motion
1D Resonant
1D Resonant
2D Resonant
2D Resonant
Frequency
1.15kHz
5.3kHz
Fast Axis:13kHz ; Slow Axis:1.2kHz
Fast Axis:25kHz ; Slow Axis:2.3kHz
Optical Scan Angle
±30°
±30°
   Fast Axis:±15° ; Slow Axis:±12°
Fast Axis:±15° ; Slow Axis:±12°
Mirror Coating
Au
Au
Au
Au
Datasheet
C1130
C1100
C2110
C2120



Model 
C1130
C1100
C2110
C2120
Product Photo
Type of Motion
1D Resonant
1D Resonant
2D Resonant
2D Resonant
Frequency
1.15kHz
5.3kHz
Fast Axis:13kHz ; Slow Axis:1.2kHz
Fast Axis:25kHz ; Slow Axis:2.3kHz
Optical Scan Angle
±30°
±30°
   Fast Axis:±15° ; Slow Axis:±12°
Fast Axis:±15° ; Slow Axis:±12°
Mirror Coating
Au
Au
Au
Au
Datasheet
C1130
C1100
C2110
C2120