MEMS Mirror/Module
Zhisensor provide MEMS Mirror and MEMS Modules with integrated closed-loop control

MEMS Mirror

MEMS mirror is an optical actuator,which is used to steer the laser beam.Since this mirror can achieve high-speed and dynamic scanning of the laser beam, the mechanical scanner could be efficiently replaced.MEMS mirror is made of monocrystalline silicon, which has the characteristics of high reliability, small volume, light weight and readily to be batch fabricated.

MEMS Mirror Module

A compact scan module is commercially available from Zhisensor. It contains a MEMS mirror, the corresponding driver, and a closed-loop control system. This greatly reduces the difficulty of customer development and speeds up the process of product development.