MEMS MirrorC1100/C1130/C2110/C2120+ 更多
MEMS mirror is an optical actuator, which is used to steer the laser beam.Since this mirror can achieve high-speed and dynamic scanning of the laser beam, the mechanical scanner could be efficiently replaced.MEMS mirror is made of monocrystalline silicon, which has the characteristics of high reliability, small volume, light weight and readily to be batch fabricated.The surface of the chip is covered with Au, which reflectivity for infrared light ( wavelength ≥ 800nm) over 95%.
Zhisensor MEMS Mirror is electrostatic driven resonant, which has the characteristics of small size, light weight, low power consumption, long life and low cost.
Type of Motion
Optical Scan Angle