MEMS Mirror
C1100/C1130/C2110/C2120

MEMS mirror is an optical actuator, which is used to steer the laser beam.Since this mirror can achieve high-speed and dynamic  scanning of the laser beam, the mechanical scanner could be efficiently replaced.MEMS mirror is made of monocrystalline silicon, which has the characteristics of high reliability, small volume, light weight and readily to be batch fabricated.The surface of the chip is covered with Au, which reflectivity for infrared light ( wavelength ≥ 800nm) over 95%.

5
4

Characteristics

Zhisensor MEMS Mirror  is electrostatic driven resonant, which has the characteristics of small size, light weight, low power consumption, long life and low cost.
2_22_6

Small Volume, Light Weight

蓝_9_9蓝_9

Lower Power Consumption

2_32_7

Longer Lifetime，High Reliability

2_42_8

Easy To Batch Fabricated，Low Cost

Application
振镜-02
Machine Vision
振镜-03
Lidar
振镜-04
Laser projector
振镜-05-05
Medical Imaging

Specification





Model
C1100
C1130
C2110
C2120
Type of Motion
1D Resonant
1D Resonant
2D Resonant
2D Resonant
Mirror Diameter
1.3mm
3mm
1mm
1mm
Resonant Frequency
5.8kHz±10%
1.15kHz±10%
Fast Axis：13kHz±10%
 Slow Axis：1.2kHz±10%
 Fast Axis：25kHz±10%
  Slow Axis：2.3kHz±10%
Optical Scan Angle
±30°
±30°
±30°
±30°
Mirror Coating
Au
Au
Au
Au
Datasheet
微振镜1