MEMS Mirror
C1100/C1130/C2110/C2120

MEMS mirror is made of monocrystalline silicon.
Mirror size is 1mm to 3mm, with gold plated mirror surface and good reflectivity for infrared light.

5
4

Characteristics

The MEMS mirror is electrostatic driven resonant, which has obvious advantages.
2_22_6

Small Volume, Light Weight

蓝_9_9蓝_9

Lower Power Consumption

2_32_7

Longer Lifetime,High Reliability

2_42_8

Easy To Batch Fabricated,Low Cost

Application
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Machine Vision
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Lidar
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Laser projector
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Medical Imaging market

Specification





Model
C1100
C1130
C2110
C2120
Type of Motion
1D Resonant
1D Resonant
2D Resonant
2D Resonant
Mirror Diameter
1.3mm
3mm
1mm
1mm
Resonant Frequency
5.8kHz±10%
1.15kHz±10%
Fast Axis:13kHz±10%
 Slow Axis:1.2kHz±10%
 Fast Axis:25kHz±10%
  Slow Axis:2.3kHz±10%
Optical Scan Angle
±30°
±30°
±30°
±30°
Mirror Coating
Au
Au
Au
Au
Datasheet
微振镜1