MEMS MirrorC1100/C1130/C2110/C2120
MEMS Mirror
C1100/C1130/C2110/C2120
MEMS mirror is made of monocrystalline silicon.
Mirror size is 1mm to 3mm, with gold plated mirror surface and good reflectivity for infrared light.
Characteristics
Characteristics
The MEMS mirror is electrostatic driven resonant, which has obvious advantages.
Small Volume, Light Weight
Small Volume, Light Weight
Lower Power Consumption
Lower Power Consumption
Longer Lifetime，High Reliability
Longer Lifetime，High Reliability
Easy To Batch Fabricated，Low Cost
Easy To Batch Fabricated，Low Cost
Application
Machine Vision
Lidar
Laser projector
Medical Imaging market
Specification
Specification
 |  |  |
| |
Model | C1100 | C1130 | C2110 | C2120 |
Type of Motion
| 1D Resonant | 1D Resonant | 2D Resonant | 2D Resonant |
Mirror Diameter | 1.3mm | 3mm | 1mm | 1mm |
Resonant Frequency | 5.8kHz±10% | 1.15kHz±10% | Fast Axis：13kHz±10% Slow Axis：1.2kHz±10% | Fast Axis：25kHz±10% Slow Axis：2.3kHz±10% |
Optical Scan Angle | ±30° | ±30° | ±30° | ±30° |
Mirror Coating | Au | Au | Au | Au |
Datasheet
