MEMS Mirror Module
P1100/P1130/P1150/P1220

A compact scan module is commercially available from Zhisensor. It contains a MEMS mirror, the corresponding driver, and a closed-loop control system. The most important component of is a MEMS mirror, which is a chip based on MEMS technology. Under the driver signal, the MEMS mirror makes a resonant torsional.
This greatly reduces the difficulty of customer development and speeds up the process of product development.

Characteristics

Zhisensor MEMS Modules chip the rotating device in the traditional navigation lidar ，which has the advantages of high resolution, high reliability, low cost, small size, easy integration.
This module can provide real-time scanning position of MEMS mirror. The module outputs a marking signal when the MEMS mirror scanning a marking angle. Furthermore, the marking angle is configurable to users. Incremental pulse signals are indicated as the position of MEMS mirror with a maximum resolution of 0.05°.
 
2_22_6

Small Volume, Light Weight

蓝_9_9蓝_9

Lower Power Consumption

2_32_7

Longer Lifetime，High Reliability

2_42_8

Easy To Batch Fabricated，Low Cost

Application
振镜-02
Machine Vision
振镜-03
Lidar
振镜-04
Laser projector
振镜-05-05
Medical Imaging

Testing Board For MEMS Mirror Module

The evaluation suite includes MEMS scanning module and official testing board. Therefore, customers can visually set up and view the working status of the module with the help of testing board. This is helpful for customers to evaluate the product rapidly
The test board is a tool to interact with the MEMS mirror module P1130 and P1100 .There are LCD display for output and physical buttons for input on the test board. The functions of test board are mainly divided into three parts: module detection, module setting and working state query.
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Specification

扫描组




Model
P1100
P1130
P1150
P1220
Type of Motion
1D Resonant
1D Resonant
1D Resonant
1D Resonant
Mirror Diameter
1.3mm
3mm
5mm
20mm*12mm
Frequency
5.8kHz±10%
1.15kHz±10%
400Hz±10%
200Hz±10%
Optical Scan Angle
±30°
±30°
±30°
±30°
Angular Resolution
0.05°
0.05°
0.05°
0.05°
Operating Voltage
5V
5V
5V
5V
Mirror Coating
Au
Au
Au
Au
Datasheet